Abstract:A novel phase-locked loop (PLL) -based closed-loop driving circuit with ultra-low-noise trans-impedance amplifier (TIA) is proposed. The TIA is optimized to achieve ultra-low input-referred current noise. To track drive-mode resonant frequency and reduce frequency jitter of actuation voltage, a PLL-based driving technique is adopted. Implemented on printed circuit board (PCB), the proposed driving loop has successfully excited MEMS element into resonance, with a settling time of 3s. The stable frequency and amplitude of TIA output voltage are 10.14KHz and 800mVPP, respectively. With sense-channel electronics, the gyroscope exhibits a scale factor of 0.04mV/°/s and a bias instability of 57.6°/h, which demonstrates the feasibility of the proposed driving circuit.